Industrial MEMS on SOI

The industrial use of silicon on insulator (SOI) substrates is quickly spreading. For microelectronics applications, this material brings new functionality, such as radiation-hard, high-voltage or low-voltage and low-consumption integrated circuits. Industrial wafers are now commercially available and new technologies, such as Smart Cut from SOITEC company, will provide low prices in high-volume production. SOI also provides very important features for microelectromechanical systems (MEMS) and new industrial products, such as high-temperature and low-noise piezoresistive pressure sensors or miniature high-performance capacitive pressure and acceleration sensors, are now proposed. These new generic technologies will provide various industrial products in the near future. (Some figures in this article are in colour only in the electronic version; see www.iop.org)